Traceable Systems | USA

A recently common method at production sites where traceability is a major concern is to perform "Direct Parts Marking" (DPM) in which a code is directly marked on the parts themselves. DPM of parts that are too small for affixing a label consists of inscribing the part with the code, allowing it to be used for a wide variety of industries such as electronic parts and medical equipment. Many semiconductor manufacturers probably have already introduced DPM or are probably currently studying its introduction.

Various highly flammable gases such as hydrogen, propane and arsine are used in manufacturing semiconductors. A conventionally used measure to prevent explosion is to eliminate arc generation, which is one aspect of gas discharge, when equipment is charged with nitrogen. Although some may believe that this is a sufficient safety measure, measures such as these cannot be said to thoroughly prevent explosion. To understand why, it is necessary to realize that even if using the conventional method of charging with gas, there is still a possibility of an explosive atmosphere being created if a machine charged with nitrogen suffers a malfunction, such that the risk of explosion is not completely eliminated. The question then is, what are proper explosion-proof measures to apply to semiconductor manufacturing sites?