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Compact Safety Door Switches

Contributes to downsizing of semiconductor manufacturing equipment. Thinnest safety door switches on the market.

Downsizing equipment used inside clean rooms

As clean rooms cannot be easily expanded, the demand for downsizing of equipment is high to utilize limited space. However, even if downsizing is mechanically possible, the size of each part becomes a bottleneck and equipment cannot be made smaller in many cases. For example, when using parts that comply with SEMI standards, by considering safety, it is difficult to find the appropriate size for parts and end up wasting space. Many of the semiconductor manufacturing equipment manufacturers most likely want to use small parts.


Thinnest door lock switches in its class expand flexibility in design
Here’s a more specific example. Semiconductor manufacturing equipment that operates long hours has doors on all four sides to confirm the operation status and for maintenance purposes. Each door is required to have a door interlock switch on the inside of the door to ensure safety during opening and closing. If the door interlock switches can be downsized, more space inside the equipment becomes available, allowing for smaller equipment design. Many designers may have given up on designing smaller doors on equipment because they could not find small door interlock switches.
To support customers solve this issue, IDEC introduced the HS6E and HS6B door interlock switches that are the thinnest safety door switches currently on the market. As both door switches can be installed in three directions, flexible installation is possible. Five different types of actuators are available and therefore, the most appropriate actuator can be used on various doors such as sliding or swing doors. Also, the door switches comply with SEMI standards to ensure safety performance.

Two types of safety door switches are available
IDEC has two types of miniature safety switches for installation in equipment. Depending on the risk assessment at customer sites, HS6E door interlock switches with solenoid and HS6B door switches without lock function can be selected. IDEC is a specialist on safety and switches, and can provide your company with consulting on safety solutions including strict safety standards such as ISO and SEMI. Please contact IDEC you have any concerns about safety.

Reduce total cost with high-performance compact code reader
In conventional designs, code readers installed on load ports had limited installation flexibility. In addition to having to purchase additional parts used to adjust the reading angle, it also took a lot of time to set it up at the correct angle. There were also many semiconductor manufacturing equipment load port designers who thought that it was important to reduce the total cost including the code reader.
In response to this, IDEC introduced the WB2F 2D code scanner capable of reliably reading codes at an angle. Just 24mm x 40 mm x 32 mm in size, the compact WB2F is equipped with a high resolution 1.2 megapixel CMOS image sensor can read small symbols over a wide area. It can be easily integrated into small devices.
In addition to the auto-tuning function that reduces overall adjustment time, this model is also equipped with an image storage function that reduces the amount of work required when there is a reading error. This allows excellent traceability while keeping costs low.

Ideal for semiconductor manufacturing applications in addition to load ports
The WB2F 2D code scanner is capable of reading codes even from distances up to 150 mm. It is also compatible with various types of barcode and 2D codes.
Therefore, it is possible to read codes installed in various locations and can be used in a wide range of applications such as with FOUP enclosures holding 300 mm wafers, cassettes holding 200 mm wafers, and wafer frames that prevent damage.