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Smart EMO Switches

How can major losses be avoided from damage on EMO switches of semiconductor manufacturing machines?

Risks of major losses from EMO switch damage

In semiconductor manufacturing, the most important challenge is how to keep the productivity of factories high while keeping machines operating. There are processes where dangerous solvents and chemicals are used and if power supply is cut due to emergency stop switches that shut down the power to machines, a dangerous secondary condition such as gas leak may occur. Thus, SEMI, the semiconductor industry safety standards, requires EMO switches be installed to close only the load areas that created dangerous conditions and to keep the movement of other safety-related equipment. However, the mechanical structure of conventional EMO switches poses risks that circuits may not be interrupted even if the switches are pressed, if the switches are damaged due to excessive impact. Some of semiconductor manufacturing machine manufacturers would mostly likely have the need of improving safety of machines by minimizing such risks.

EMO switches with reliable safety mechanisms to securely shut off only the circuit under dangerous conditions
Being able to interrupt only the part of the circuit that caused dangerous conditions in an emergency situation is crucial to the credibility of semiconductor manufacturing machines. What IDEC has to offer for semiconductor manufacturing machine manufacturers who need to design safe machines is the third generation EMO Stiches, the XW series. The XW series are equipped with two safety structures: Reverse Energy Structure and Safe Break Action. Even if switches are damaged due to excessive force or impact, or even if the contact block is detached from the operator unit due to improper installation, NC contact remains closed mechanically (contacts OFF) to shut off the circuit of the operation part that caused dangerous conditions. Thus, even if EMO switch operations fail, the problem circuit can be securely shut off, which ensures that losses in the factory do not expand. The various product line-up of switch guards and stickers are available for EMO switches of the XW series. Many accessories to prevent unintentional operation at normal occasions are available, too.

A wide variety of switches for flexible design
Semiconductor manufacturing machines are not only required to secure safety, but also need to meet with a growing demand for downsizing. IDEC has the o16mm XA series in addition to the o22mm XW Series for semiconductor manufacturing machine makers who opt for further downsizing. Either series have variations in button shapes and sizes and can satisfy designers’ requests for smaller machines and ease of use. SEMI S2-compliant switch guards are available, too, for various purposes. Let IDEC help you ensure safety as IDEC switches and other products are always updated to meet changes in the standards such as ISO and SEMI.

Reduce total cost with high-performance compact code reader
In conventional designs, code readers installed on load ports had limited installation flexibility. In addition to having to purchase additional parts used to adjust the reading angle, it also took a lot of time to set it up at the correct angle. There were also many semiconductor manufacturing equipment load port designers who thought that it was important to reduce the total cost including the code reader.
In response to this, IDEC introduced the WB2F 2D code scanner capable of reliably reading codes at an angle. Just 24mm x 40 mm x 32 mm in size, the compact WB2F is equipped with a high resolution 1.2 megapixel CMOS image sensor can read small symbols over a wide area. It can be easily integrated into small devices.
In addition to the auto-tuning function that reduces overall adjustment time, this model is also equipped with an image storage function that reduces the amount of work required when there is a reading error. This allows excellent traceability while keeping costs low.

Ideal for semiconductor manufacturing applications in addition to load ports
The WB2F 2D code scanner is capable of reading codes even from distances up to 150 mm. It is also compatible with various types of barcode and 2D codes.
Therefore, it is possible to read codes installed in various locations and can be used in a wide range of applications such as with FOUP enclosures holding 300 mm wafers, cassettes holding 200 mm wafers, and wafer frames that prevent damage.